Influence of a square pulse voltage on argon-ethyl lactate discharges and their plasma-deposited coatings using time-resolved spectroscopy and surface characterization

Authors: Laurent, Morgane; Desjardins, Edouard; Meichelboeck, Maximilian; Belinger, Antoine; Naudé, Nicolas; Stafford, Luc; Gherardi, Nicolas; Laroche, Gaétan
Abstract: By comparing time-resolved optical emission spectroscopy measurements and the predictions of a collisional-radiative model, the evolutions of electron temperature (Te) and number density of argon metastable atoms [n(Arm)] were determined in argon-ethyl lactate dielectric barrier discharges. The influence of a square pulse power supply on Te, n(Arm), and discharge current is evaluated and correlated with the chemistry and the topography of plasma-deposited coatings. Pulsed discharges were found to have shorter (100 ns) but stronger (1 A) current peaks and higher electron temperatures (0.7 eV) than when using a 35 kHz sinusoidal power supply (2 μs, 30 mA, 0.3 eV). The n(Arm) values seemed to be rather stable around 1011 cm−3 with a sinus power supply. In contrast, with a pulse power supply with long time off (i.e., time without discharge) between each pulse, a progressive increase in n(Arm) from 1011 cm−3 up to 1012–1013 cm−3 was observed. When the time off was reduced, this increase was measured in sync with the current peak. The chemical composition of the coatings was not significantly affected by using a pulse signal, whereas the topography was strongly influenced and led to powder formations when reducing the time off.
Document Type: Article de recherche
Issue Date: 15 October 2018
Open Access Date: 24 July 2019
Document version: AM
This document was published in: Physics of plasmas, Vol. 25 (10), 103504 (2018)
AIP Publishing
Alternative version: 10.1063/1.5046181
Collection:Articles publiés dans des revues avec comité de lecture

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