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Characterization of argon dielectric barrier discharges applied to ethyl lactate plasma polymerization

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Desjardins, Edouard
Stafford, Luc
Gherardi, Nicolas
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Institute of Physics Publishing Ltd
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The influence of the input voltage frequency (35 and 150 kHz), interelectrode gap (1 and 2 mm) and precursor concentration (250, 350, and 450 ppm) on the electron temperature (Te), number density of metastable Ar atoms (n(Arm)), and discharge current density (proportional to the electron density ne) is studied in an argon-ethyl lactate dielectric barrier discharge (DBD). An argon-ammonia Penning mixture is also considered as reference. These results are correlated to the chemistry (XPS, IR) and topography (AFM) of the ethyl-lactate-based plasma polymer coatings. Low Te values from 0.3 to 0.5 eV were obtained for all discharges. This observation, in addition to resemblances with the Ar–NH3 mixture, suggested that the ionization kinetics of ethyl lactate-based discharges is driven by Penning reactions. Among the investigated parameters, the dissipated power obtained through changes of the excitation frequency had the largest impact on both the coatings properties and the discharge behavior.

Journal of physics. D, Applied physics, Vol. 50 (47), 475205 (2017)
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Dielectric barrier discharge , Electron temperature , Argon metastable , Ethyl lactate , Optical emission spectroscopy , Current density , Décharge à barrière diélectrique
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article de recherche